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SiC Components SiC Ceramics Structural Parts

ブランド名:	ZMSH
モデル番号:	SICモーションコンポーネント
MOQ:	25
価格:	by case
配達時間:	2〜4週間
支払条件:	T/T

詳細情報

製品の説明

詳細情報

起源の場所:

中国

証明:

rohs

熱伝導率:

〜45 w/（m・k）（@1200°C）

モース硬度:

9.5

まっすぐ:

±0.1-0.5μm

再現性:

±75 nm以上

化学的安定性:

素晴らしい

アプリケーション:

精密光学およびレーザーシステム

パッケージの詳細:

100グレードのクリーニングルームのパッケージ

製品の説明

SiC Components Overview

SiC Components SiC Ceramics Structural Parts

Silicon Carbide (SiC) components are precision ceramic structural parts manufactured using processes such as reaction sintering or chemical vapor deposition (CVD). They are specifically designed to achieve precision positioning, transmission, or clamping functions in extreme industrial environments, including high temperature, corrosion, high wear, and vacuum conditions. By leveraging the core material properties of silicon carbide (SiC)—such as high hardness, high stiffness, low thermal expansion, high thermal conductivity, and excellent chemical stability—they provide highly reliable solutions for precision control in fields like semiconductor manufacturing, high-end industrial kilns, and laser systems.

SiC Components Core Functional Characteristics and Advantages

1. Nanoscale Accuracy and High Stability:

By leveraging silicon carbide's extremely high hardness and high elastic modulus, combined with lightweight topology-optimized structures, the components achieve exceptional smoothness and positioning accuracy, effectively resisting load-induced deformation and ensuring long-term stability.

2. Exceptional Environmental Adaptability:

Silicon carbide exhibits an extremely low coefficient of thermal expansion, highly matching silicon wafers, resulting in minimal thermal deformation. Its high thermal conductivity facilitates rapid temperature equalization, while its excellent chemical inertness resists acid/alkali corrosion and plasma erosion, making it suitable for harsh industrial environments.

SiC Components SiC Ceramics Structural Parts 1

3. True Zero Wear and Long Service Life:

Through aerostatic technology or special clamping designs, the components enable non-contact motion or non-destructive clamping, fundamentally eliminating mechanical friction and wear. Combined with the material's inherent ultra-high wear resistance, the components achieve an exceptionally long service life, significantly reducing maintenance costs.

4. High Stiffness and Vibration Suppression:

Despite employing lightweight designs, the high elastic modulus of silicon carbide and optimized structures allow the components to achieve high stiffness, effectively resisting deformation. Coupled with the damping effect of the air film or active vibration isolation design, they can effectively suppress external vibration interference.

SiC Components Applications

1. Semiconductor Manufacturing and Inspection Equipment:

As core components in the wafer stages of lithography machines, they are used for nanoscale scanning, stepping, and positioning of wafers, directly impacting the lithography's overlay accuracy. They are also widely used in wafer transfer systems, electron beam inspection equipment, and MEMS packaging for high-speed, high-precision handling and alignment.

2. Industrial Kilns and High-Temperature Processing Equipment:

Used as load-bearing guides, square beams, or kiln furniture transmission systems in tunnel kilns and shuttle kilns, they can operate stably long-term in high-temperature environments exceeding 1380°C, carrying and transporting products, significantly improving kiln operational efficiency and service life.

3. Precision Optics and Laser Systems:

Utilized in ultra-precision optical processing equipment (e.g., fly-cutting machines), laser interferometers, optical adjustment frames for high-energy lasers, and precision motion mechanisms for space telescopes, providing stable and accurate reference motion.

4. Other High-End Fields:

They are also beginning to play important roles in precision equipment for frontier areas such as aerospace (e.g., satellite laser communication assembly), new energy (e.g., fuel cell stacking), and biomedicine (e.g., gene editing devices).

SiC Components Key Parameters

Parameter Name	Typical Value/Range
Coefficient of Thermal Expansion	~4.5×10⁻⁶/K
Thermal Conductivity	~45 W/(m·K) (@1200°C)
Elastic Modulus	410 GPa or higher
Mohs Hardness	9.5
Straightness	±0.1 - 0.5 μm
Repeatability	±75 nm or higher
Maximum Operating Temperature	>1380°C (oxidizing atmosphere)
Chemical Stability	Excellent

SiC Components Q&A

Q1: What are silicon carbide (SiC) components primarily used for?

A1: They are core precision parts in semiconductor lithography equipment and industrial kilns, enabling nanoscale positioning, scanning, and load-bearing under extreme conditions like high temperature and corrosion.

Q2: Why choose silicon carbide over traditional materials for components?

A2: Silicon carbide offers exceptional hardness (Mohs 9.5), near-zero thermal expansion (~4.5×10⁻⁶/K), high thermal conductivity, and chemical inertness, ensuring long-term stability, zero wear, and minimal maintenance in high-performance applications.

Tags: #SiC Components, #Customized, #Motion Components, #SiC Ceramics Structural Parts, #Chemical Stability Excellent

札:

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